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 NameTool IdCategoryManufacturerModel
View 3D MF Probestation492MetrologyIn-houseMedium Field MR and RF Probe Station
View 4-Point5601MetrologyFour Dimensions, IncModel 280
View Activator388Thermal processesCentrothermActivator 150 (SiC anneal)
View AFM Acreo443MetrologyDigital Instruments (Veeco)Atomic Force Microscope
View AFM/SPM CellKraft Humidifier Albanova129MetrologyCellKraftP2
View AFM/SPM IPS Bipotentiostat130MetrologyIPSPGU-BI 1000
View AFM/SPM Nanow.JPK2 Albanova113MetrologyJPK InstrumentsNanowizard 3
View AFM/SSRM456MetrologyVeeco/Digital InstrumentsNanoScope Dimension 3100
View AGM491MetrologyPrinceton Measurement Corporation2900-02 Alternating Gradient Magnetometer
View AJA 2 Sputter Albanova114Thin film depositionAJA International Inc.Orion
View AJA Sputter490Thin film depositionAJA InternationalATC Orion-8
View AJA Sputter Albanova104Thin film depositionAJA International Inc.Orion
View Albanova Canon Projection Camera128LithographyCanonPPC 210
View ALD570Thin film depositionBENEQTFS200
View ALOES585Dry etchingSTSICP AOE (DRIE)
View ALS-stepper581LithographyGCA/UltratechALS 2035 G-line
View APL spinner372LithographyBLEBuilt in
View APL-HMDS3721LithographyYES-5E Vacuum Bake / Vapour Prime Processing System
View Ariel537Dry etchingOxford Plasma TechnologyPlasmalab80Plus (Oxford RIE System)
View Arnold526LithographySSE spincoaterOPTISPIN SST20
View Asterix551EpitaxyAixtron AIX 200/4Movpe
View Bake 25642LithographyBake oven DespatchPre and postprocessing of samples
View Bake 35643LithographyBake oven MemmertPre and postprocessing of samples
View Bake 45074LithographyMemmertU 26
View Bake 55075Thermal processesMemmertU 26
View Bake 65076LithographyMemmertULM 400
View Bake 73722LithographyMemmertUM 100 bake
View Balance5606Other processesBalanceVåg
View Ball bonder462Device mountingF&K Delvotec Semiconductor GmbH5410
View Baltazar spectrometer5215MetrologySPECS GmbH and homemadeHomemade
View Barbara511Thin film depositionProvacPAK 600 Coating System
View Bertil508Device mountingWest Bond 7476E-79 Manual Wedge-Wedge Wire Bonder
View Bläster5004Other processesGuyson Europlast4 SF-Select (med inställbar hjöd) samt utsugningsf
View Bond Tester DAGE466MetrologyDAGE2400PC
View Bonder542Device mountingKarl SussCB8 Substrate Bonder
View Canon EOS 350D4541Surface analysis & TEMCanonEOS 350D 100mm Macro
View CD SEM363Surface analysis & TEMHitachiS-3400N & EDS QUANTAX 200
View Centura586Dry etchingApplied MaterialsCentura II (DPS & MxP)
View CIPT495MetrologySmartipCIPTech
View Cleanroom4500Other processesElectrumElectrum Laboratory
View CMP489Other processesIPEC / AxusAvanti 472
View CNC-milling machine154Other processesMinitechMini-Mill
View Critical Point Dryer464Other processesBaltecCPD 408
View Cryo RIE Albanova106Dry etchingOxfordPlasmalab 100
View Cryogenic Probestation447MetrologyJanisST-500-UHT
View Dektak362MetrologySTDektak3ST
View Diamond saw5203Sample prepBuehlerIsomet low speed saw
View Dimple grinder5206Sample prepGatanDimple grinder
View Disco DAD saw465SawingDiscoDAD 320
View Disco-saw375SawingDiscoDFD640
View Ebeam litho Albanova100LithographyRaith GmbHRaith 150 TK
View Edvard514Thin film depositionEdvards160
View Edwards Auto 306 Albanova122Thin film depositionEdwardsAuto306 with FL400 chamber
View Electroglas444MetrologyElectroglas2001X
View Electrolyte polishing5207Sample prepFischioneElectrolyte polishing
View Emma524LithographyKarl SussMA6/BA6
View Empyrean562MetrologyPANalytical B.V.Empyrean multipurpose high resolution X-ray diffra
View Endura588Thin film depositionApplied MaterialsPVD
View Epsilon2000572EpitaxyASM200Si-epi
View Esa536Dry etchingOxford Plasma SystemPlasmalab80Plus (Oxford RIE System) Chamber B
View Eurovac UHV deposit, Albanova105Thin film depositionEurovac/ThermionicsCustom made
View Fabio535Dry etchingOxford InstrumentICP380 Etch System
View FE-TEM468Surface analysis & TEMJEOLJEM 2100F(HR), JEOL Electron Microscope 2100 Field
View FH APL3731Wet process benchesFume hoodFume hood
View FH APL-gul3724LithographyPM PlastDragskåp
View FH epi service5040Wet process benchesPM PlastDragskåp för epi rengöring
View FH Gul35071LithographyPM PlastDragskåp
View FH III/V5034Wet process benchesPM PlastDragskåp
View FH MS Nikon1372Device mountingLabrum klimatLAF
View FH MS Olympus1371Device mountingLabrum klimatLAF
View FH Service5049Wet process benchesPM plastFume hood for service
View FH wet chemistry-15041Wet process benchesPM PlastDragskåp solvent & acid (for service work)
View FH wet chemistry-2 (solvent)5042Wet process benchesPM PlastDragskåp solvent
View FH wet chemistry-35043Wet process benchesPM PlastDragskåp solvent and acid
View FH wet chemistry-45044Wet process benchesPM PlastDragskåp solvent
View FH wet chemistry-5 (solvent)5045Wet process benchesPM PlastDragskåp solvent
View FH wet chemistry-65046Wet process benchesPM PlastDragskåp solvent
View FH wet chemistry-75047Wet process benchesPM PLastDragskåp
View FH wet chemistry-85048Wet process benchesPM PlastDragskåp
View FIB/SEM Albanova101Surface analysis & TEMFEI CompanyNova 200
View Fiber anneal1506Other processesÅngpaneföreningenSpecial design
View FIB-SEM467Surface analysis & TEMFEIQUANTA 3D FEG
View Filippa509Device mountingSussMicrotecAutomatic Flip Chip Bonder FC150
View Fs Laser system 15216Other processesCoherentMira 900
View Fs Laser system 25217Other processesCoherent and APEChameleon Ultra II + APE Harmonics generator
View FTIR Spectrometer448MetrologyBrukerVortex 70 V
View FTP5005604MetrologyFTPInterferometer
View Gallus534Dry etchingOxford InstrumentICP380 Etch System (GaAs & InP)
View Gamma579LithographySuss MicrotecGamma 4M
View Gemini569Surface analysis & TEMZeiss Ultra 55
View Gold sputter FNM5202Sample prepJEOLIon sputter JFC-1100
View Grinder-polisher5204Sample prepBuehlerVector/Alpha
View Hall455MetrologyVarian/KeithlyIn-house
View HF Probestation493MetrologyIn-houseHigh Field RF Characterization Station
View HMDS 25073LithographyIMTECStar 2000 (HMDS)
View HR X-Ray561MetrologyX-RayX-Ray
View IBS515Thin film depositionCommonwealth Scientific CorporationIon Beam Sputtering Tool
View ICP533Dry etchingSTSICP DRIE (Si, SiO2)
View IDP472Thin film depositionExpertechLPCVD furnace
View Indira516Thin film depositionBalzersBA 510 Thermal Evaporator
View Ion polishing5208Sample prepGatanPrecision ion polishing 691
View Karl Suss521LithographyKarl SussMask aligner MA8/BA8
View Karl Suss MJB3 Albanova121LithographyKarl SussMJB3
View KDF519Thin film depositionKDF844GT
View Kemvåg5017Metrology??
View Kyl & frys5078Other processesElectroluxKylskåp/frys
View Lab support450Other processesELABVirtual tool
View Laboratory oven5210Sample prepHereausBench oven
View LEITZ5014MetrologyLEITZ MPV-SPThin film interferometry,
View LIMS5001Other processesElabAccess
View LPE 1061404EpitaxyLPEPE106
View Läcksökaren5005Other processesPfeiferQualyTest HLT260
View Läppus374Other processesLogitech50 Precision Lapping & Polishing Machine
View M01 Olympus3726Surface analysis & TEMOlympusBX60M
View M02 Olympus/camera3711Surface analysis & TEMOlympusBX60
View M03 Leica3712Surface analysis & TEMLeicaMicroscope
View M04 Leitz5011Surface analysis & TEMLeitzLABORLUX 12 HL
View M05 Nikon/auto5012Surface analysis & TEMNikonMicroscope
View M07 Olympus/camera5018Surface analysis & TEMOlympusMicroscope
View M08 Leitz/camera5061Surface analysis & TEMLeitzMicroscope with camera
View M09 Nikon/camera5062Surface analysis & TEMNikonMicrosocpe with camera
View M10 Nikon/auto5603Surface analysis & TEMNikonMicroscope (motorized objectives)
View M11 Nikon/CD 15602MetrologyNikonOPTISHOT/Linjebreddsmätare
View M13 Nikon/camera5612Surface analysis & TEMNikonNikon
View M14 Olympus/camera5064Surface analysis & TEMOlympusBX60
View M20 Microscope5209Sample prepNanometricsMicroscope
View Manual probstation5013MetrologySuss Microtech10500006 (probe station)
View Manual spray coater5020LithographyHome madev1
View Masktvätt5644LithographyUltra t Equipment Company, Inc.SCS 124
View Maximus523LithographySSEMaximus 804
View Megasonic bath5059Wet process benchesPCTPCT 24 wet bench
View Microwave/THz Probe Station3501MetrologyMSTMST Lab
View Mozart1401EpitaxyVeeco TurboDiscGaAs-MOVPE D180 LDM
View MS01 Nikon5063Surface analysis & TEMNikonStereo microscope SMZ-2B
View MS02 Nikon5613Surface analysis & TEMNikonStereo microscope SMZ-2T
View Napoleon1403EpitaxyAixtronVP508GFR SiC epi
View Network Analyzer5453MetrologyAgilentPNA 110 GHz
View Niklas361MetrologyNikonNiklas
View Nikon Microphot-FXA153Other processesNikonMicrophot-FXA
View Nils525LithographyEVG620 UV Nanoimprint Lithography
View NSR589LithographyNikonTFHi12
View Obelix1552EpitaxyAixtronLP-VPE 2106
View Opt. micr. 1, Albanova124Surface analysis & TEMNikonME600
View Opt. micr. 2, Albanova125Surface analysis & TEMNikonME600
View Opt. micr. 3, Albanova126Surface analysis & TEMNikonEclipse L200
View Opt. micr. 4, fluorescence, Albanova127Surface analysis & TEMNikonME600 w. fluorescence unit
View Optical profilometer454MetrologyVeecoWyko NT9300
View Orthodyne461Device mountingOrthodyne20 Large Wirebonder
View P5000587Dry etchingApplied MaterialsPrecision 5000 Mark II (Dielectric, MxP, CVD)
View Pamela568Dry etchingSTS 308PC (RF Plasma Asher)
View Pekka518Thin film depositionPlasmalab80Plus (Oxford PECVD System) Chamber A
View Peo540Thermal processesPEOPEO-603 Anneal furnace III/V (ramp)
View Plasma cleaner5201Sample prepFischionePlasma cleaner
View Plasmatvätt Pico1380Dry etchingDiener PICO RFLow pressure plasma etcher
View PLD20120509Thin film depositionNeocera IncNeocera Pioneer 180 UHV PLD
View Preparation lab469Sample prepCollection of toolsTools for sample preparation
View Probestation 1 Manual457MetrologyCascade11000
View Probestation 2 High Voltage458MetrologyCascade8-inch manual
View Probestation 3 Semi Automatic459MetrologyCascade MicrotechCascade 12000
View Probestation 4 High Temp.453MetrologySignatoneS-1060
View Profiler Albanova120MetrologyKLA-TencorP15
View Prometeus auto441MetrologyKarl Suss and Temptronic TermoChuck SystemAutomatic Probestation PA 150 and TP03215B-3300-2
View Prometeus manual440MetrologyKarl Suss and Temptronic TermoChuck SystemManual Probestation PM 5, TP0314A
View Quickseal5591Other processesQuicksealInplastning
View R/D 25664Wet process benchesVerteqVerteq 4"
View R/D 35033Wet process benchesVerteqVerteq
View R/D double5058Wet process benchesSemitoolSemitool Double 870S
View R/D Gold5057Wet process benchesFSI PhoenixFSI Phoenix 4" Au/Lift-Off
View R/D Gul15023Wet process benchesFSI PhoenixFSI Phoenix 4"
View R/D Metals5056Wet process benchesSemitoolSemitool 4" Metals
View Rakel506Device mountingDage Precima InternationalRakel
View Raman Spectrometer HORIBA iHR 5505214MetrologyHORIBA Jobin YvoniHR 550
View Renrum5000Other processesElabAccess
View RIBE554Dry etchingOxford Instruments Plasma TechnologyIonfab 300 plus
View RIE531Dry etchingPlasmalab System 100RIE of thin films (Si3N4 & SiO2)
View RIE ICP O2/AR Albanova103Dry etchingOxfordPlasmalab 80+
View Rinser 13733Wet process benchesVerteqVerteq
View Rinser 23725Wet process benchesVerteqVerteq
View RoomR5002Other processesElabresponsible
View RTA576Thermal processesMattson100 RTP Systems
View Rörtvätt5003Other processesKTHhandmade
View Sabina507LithographySSESpinner model Primus SB15
View Scanning near-field optical microscope (SNOM)5218Surface analysis & TEMMax Born Institute with modifications at KTHA home-made instrument
View Semlan1402EpitaxyEpigress VP508/SK SiC-VPE
View Skivthk5016MetrologyMitutoyoRDP transducer indicator E307-1
View Speed mixer152Other processesMSTMST lab
View SPM/AFM FastScan Albanova110MetrologyBrukerDimension FastScan
View SPM/AFM Icon Albanova109MetrologyBrukerDimension Icon
View SPM/AFM Multimode Albanova102MetrologyBruker (formerly Veeco) Multimode Nanoscope IV
View SPM/AFM Nanowizard JPK Albanova111MetrologyJPK InstrumentsNanowizard 3 Bioscience AFM
View Sputnik Albanova107Thin film depositionThermionics + otherCustom made
View SQUID-VSM496MetrologyQuantum DesignUtlrasensitiv magnetometer
View SSE Sprayets1374Wet process benchesSSESprayets
View SSEC4890Wet process benchesVeccoSSEC 3300
View STM 15212Surface analysis & TEMOmicronOmicron STM-1
View STS575Thin film depositionSTSPECVD
View T1-Oxide 1250C485Thermal processesThermco5200
View T2-Oxide 1250C486Thermal processesThermco5200
View T3-Gate ox487Thermal processesThermco5200
View T4-FGA488Thermal processesThermco5200
View Tencor P105010MetrologyTencorSurface profiler Tencor-P10
View Tencor P15501MetrologyTencorSurface profiler Tencor-P15
View Tepla530Dry etchingTePla300 (Microwave Plasma Asher)
View Testtool20090417Other processesTest AB eller OYStandard
View Testtool ELAB20120702MetrologyElectrum labmodel 1
View Theta Lite151Surface analysis & TEMMSTMST lab
View TLE lab5446Other processesTanner15.10
View UEM470Surface analysis & TEMJEOL JEM-2100Ultrafast Electron Microscopy
View uFAB150Other processesMSTMST lab
View UHV SPM 35005213Surface analysis & TEMRHK TechnologyUHV SPM 3500
View Ultrasonic disc cutter5205Sample prepGatanModel 601
View UVISEL557MetrologyHORIBAUVISEL ER
View UVO Cleaner3713Sample prepJelight COmpany, Inc42-220
View W06075662Wet process benchesWet bench HF cleanWet bench HF clean and HF doped
View W26315031Wet process benchesWet benchWet bench spray etch (GaAs).
View W32335032Wet process benchesWet benchWet bench lift off.
View W345070Wet process benchesWet benchWet bench Lithografi
View Wetb Al etch5055Wet process benchesWet benchEtching
View Wetb APL-gul3723Wet process benchesWet benchWet bench
View Wetb Au develop5022Wet process benchesWet benchWet bench
View Wetb MEMS5051Wet process benchesWet benchTMAH, HF, KOH
View Wetb metal5053Wet process benchesWet benchAu/metal etch
View Wetb Sabina5077Wet process benchesPM Plast2 HP, Developer, Sink
View Wetb Si process5052Wet process benchesWet bench oxideWet bench oxide,HF 1:10,BHF,HFmix
View Wetb Si strip5021Wet process benchesWet bench developerPhotoresist processing.
View Wetb SiC3732Wet process benchesWet bench Substrate cleaning
View Wetb solvent5054Wet process benchesWet benchRemover, Vax, Au module
View Wetb-diff-clean5661Wet process benchesWet bench CleanWet bench Clean and IMEC
View Wire bonder Albanova123Device mountingKulicke - Soffa4523D
View VT STM5211Surface analysis & TEMOmicronOmicron VT-STM
View Yes-ugn367Thermal processesYESPolyimide Bake Oven YES-450PB8-2/6-2
View Zita512Thin film depositionBalzersBAE 250 Coating System
View ZVA-24 Vector Network Analyzer155MetrologyMSTMST Lab
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