Picture of NSR
Current status:
WARNING
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
You must be logged in to view files.

Nikon NSR TFHi12 is an I-line (365 nm) Stepper

Handles 100 and 150 mm wafers in cassette to cassette mode

Smaller wafers can be handle with carriers

Reticle: 6 inch 

Possibility of pellicle: Yes 

Field size: 22x22 mm2

Variable NA=0.3-0.45

Resolution:~0.5 µm at NA=0.45 and DOF~ +/- 1 µm

Resolution:~0.75 µm at NA=0.3 and DOF~ +/- 2 µm

Tool name:
NSR
Area/room:
C-Gul 1
Category:
Lithography
Manufacturer:
Nikon
Model:
TFHi12
Tool rate:
E
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

Instructors

Licensed Users

You must be logged in to view tool modes.