Picture of Wetb solvent
Current status:
AVAILABLE
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Technical description

Full equipment name: Wet bench solvent W25
General purpose: Removing organic material (resist) from wafers/samples
Technical data:
• 2 stainless steel ultrasonic baths with heater and timer for lift off (1 and 3)
• Bubbler for lift off (2)
• Stainless steel bath for aceton with valve (4 - No lift off)
• Stainless steel bath for propanol with valve (5 - No lift off)
• Bubbler (6 - No lift off)
• Nitrogen-gun
• DI Water gun
• Sprinkler system
• Cassettes, cassette holders and single wafer holders marked black-yellow.
 

Tool name:
Wetb solvent
Area/room:
C-Wet Chemistry
Category:
Wet process benches
Manufacturer:
Wet bench
Model:
Remover, Vax, Au module
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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