Picture of Ebeam litho Albanova
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AVAILABLE
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Ebeam lithography system, Raith Voyager.

50 kV acc. voltage (fixed). Laserinterferometric table gives stitching error  < 20 nm (3 sigma).

Overlay accuracy 20 nm (3 sigma).

Installed option FBMS (Fixed Beam Moving Stage) and MBMS (Modulated Beam Moving Stage) gives possibility of stitch error free patterning over large areas. Current sample holder accomodates sample sizes up to two inch

Web Manual   Time booking policy

Tool name:
Ebeam litho Albanova
Area/room:
Albanova E1:1015A
Category:
Lithography
Manufacturer:
Raith GmbH
Model:
Raith Voyager
Tool rate:
E
Max booking time, day:
12 hours
Max booking time, night:
24 hours
No. of future bookings:
3

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