Picture of Asterix
Current status:
AVAILABLE
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Technical description
Full equipment name:
Aixtron 200/4 MOVPE
General purpose:
Horizontal reactor with gasfoil rotation. Growth of III/V epitaxial semiconductors. InP, GaAs, GaSb, InAs

Technical data:
 

Tool name:
Asterix
Area/room:
C-Epi-III/V
Category:
Epitaxy
Manufacturer:
Aixtron AIX 200/4
Model:
Movpe
Tool rate:
E
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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