Picture of Opt. micr. 3, Albanova
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Metallurgical optical microscope. Only epi-illumination (reflected light). Dark field illumination. Large table for wafer inspection. No camera.

More info here.

Tool name:
Opt. micr. 3, Albanova
Area/room:
Albanova C1:3049
Category:
Surface analysis & TEM
Manufacturer:
Nikon
Model:
Eclipse L200
Tool rate:
A
Max booking time, day:
3 hours
Max booking time, night:
8 hours
No. of future bookings:
3

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