Picture of W34
Current status:
AVAILABLE
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Technical description

Full equipment name: Wet bench Lithografi W34
General purpose: Photoresist processing
Technical data:
• Chemicals: Acetone, HMDS, 351 developer, photoresist
• Hotplate
• HMDS tank
• 351 developer tank
• Nitrogen gun
• D.I. bubbler
• Aceton tank for cleaning of spincoater parts
• Sink for solvents incl. D.I. water tap
 

Tool name:
W34
Area/room:
C-Gul 3
Category:
Wet process benches
Manufacturer:
Wet bench
Model:
Wet bench Lithografi
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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