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Current status:
AVAILABLE
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Technical description
Full equipment name: Polyimide Bake Oven YES-450PB8-2/6-2
General purpose:
Curing of polyimide, benzocyclobutene (BCB) or similar resins in inert gas atmosphere and/or under reduced pressure.
Technical data:
• Stainless steel chamber with laminar flow system
• Preheated nitrogen flow (process gas)
• 200 mm wafer capability
• 5 heaters
• Process Temperature range: RT– 450 °C
Equipment inventory:
• 2 Cassettes for 100 mm wafers
• 1 Tool for load/unload cassette
 

Tool name:
Yes-ugn
Area/room:
C-Gul 3
Category:
Thermal processes
Manufacturer:
YES
Model:
Polyimide Bake Oven YES-450PB8-2/6-2
Tool rate:
C
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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