Picture of Sheet Resistance 4 point Mapper
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General:

SR2000N is a 4-point sheet resistance mapper. It can be operated manual mode and in a semi-automatic mode, controlled by a computer.

Sample size can vary from pieces to 200 mm wafers.

Mapping grids can be generated, and the default grid size is 49-points over a wafer (measurement takes a few minutes). Data can be exported in .txt-format.

Sheet resistance range is 1 mOhm/sq - 2 MOhm/sq. Thickness of metals can be automatically calculated provided the correct resistivity is given.

 

Restrictions:

No gold, no copper on samples!

Backside of samples must be clean

Only USB-memory sticks free from virus, worms, trojans or other maleware are allowed!

Tool name:
Sheet Resistance 4 point Mapper
Area/room:
C-RIBE
Category:
Metrology
Manufacturer:
MDC
Model:
SR2000N
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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