Picture of Tepla 300
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Fredrik.E Ekström
2nd Responsible:
Files
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Description
Details
Tool name:
Tepla 300
Area/room:
C-Epitaxy
Category:
Dry etching
Manufacturer:
Tepla
Model:
300 semi-auto
Tool rate:
B
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Tool Modes
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