Picture of AJA 2 Sputter Albanova
Current status:
AVAILABLE
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AJA ATC2200 sputtering system

Four sputtering guns, two targets available: Nb and Ti. The tool is intended for Nb and Ti deposition ONLY.

Process gases: Ar, N2, O2. Sample heating and DC bias available.

More info here.

All usage must be coordinated with Julien Zichi, zichi@kth.se

Tool name:
AJA 2 Sputter Albanova
Area/room:
Albanova C1:3052
Category:
Thin film deposition
Manufacturer:
AJA International Inc.
Model:
Orion
Tool rate:
D
Max booking time, day:
10 hours
Max booking time, night:
12 hours
No. of future bookings:
3

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Licensed Users

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