Picture of Probestation 3 Semi Automatic
Current status:
AVAILABLE
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General description: Electric/Magnetic Characterization

Technical description

Semiautomatic 8 inch Cascade 12000 wafer prober with hot/cold chuck

Is fully equipped for 4-terminal on wafer measurements

Connected instruments

Agilent PNA 110 GHz

Keithley SCS 4200 IV/CV/pulse and ACS wafer mapping software

2 Medium powerCurrent voltage SMU

2 High resolution SMUs

2 channel CV

2 channel pulsed IV

Thermal chuck and microchamber for operation -65 deg C to +200 deg C.

 

Tool name:
Probestation 3 Semi Automatic
Area/room:
Y-Electrical characterization
Category:
Metrology
Manufacturer:
Cascade Microtech
Model:
Cascade 12000
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:
4

Instructors

Licensed Users

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