General description: Electric/Magnetic Characterization
Technical description
Semiautomatic 8 inch Cascade 12000 wafer prober with hot/cold chuck
Is fully equipped for 4-terminal on wafer measurements
Connected instruments
Agilent PNA 110 GHz
Keithley SCS 4200 IV/CV/pulse and ACS wafer mapping software
2 Medium powerCurrent voltage SMU
2 High resolution SMUs
2 channel CV
2 channel pulsed IV
Thermal chuck and microchamber for operation -65 deg C to +200 deg C.