Picture of Indira
Current status:
AVAILABLE
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Technical description
Full equipment name: Balzers BA 510 Thermal Evaporator
General purpose: Thermal evaporation of Indium
Technical data:
• Evaporation of thick layers of indium (~6.5 µm)
• Wafer holders for 3”, 4” and 6”
• Uniformity: +/- 5% within 4” wafer
 

Tool name:
Indira
Area/room:
C-Metal-III/V
Category:
Thin film deposition
Manufacturer:
Balzers
Model:
BA 510 Thermal Evaporator
Tool rate:
D
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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