Picture of Activator
Current status:
AVAILABLE
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Technical description
1. Full equipment name: Centrotherm Activator 150
2. General purpose: Anneal furnace
3. Detailed description
High temperature furnace for Sic Anneal
4. Capabilities
Max size Sic wafer : 4”
Max wafer carrying capacity : 5
Max Anneal temperature: 1700 deg C
5. Restrictions
Make sure to check if your sample is suitable to be annealed in the Activator.

Tool name:
Activator
Area/room:
C-Anneal
Category:
Thermal processes
Manufacturer:
Centrotherm
Model:
Activator 150 (SiC anneal)
Tool rate:
D
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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