Technical description
1. Full equipment name: Centrotherm Activator 150
2. General purpose: Anneal furnace
3. Detailed description
High temperature furnace for Sic Anneal
4. Capabilities
Max size Sic wafer : 4”
Max wafer carrying capacity : 5
Max Anneal temperature: 1700 deg C
5. Restrictions
Make sure to check if your sample is suitable to be annealed in the Activator.