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FEI Nova 200 dual beam system.

Scanning electron microscope and focussed ion beam, gallium source for ion beam, one gas injector for platinum deposition.

Info and Manuals.

Tool name:
FIB/SEM Albanova
Area/room:
Albanova E1:1015A
Category:
Surface analysis & TEM
Manufacturer:
FEI Company
Model:
Nova 200
Tool rate:
D

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