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Current status:
WARNING
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Single wafer wet processing

100 mm and 200 mm wafers

Available processes

HF

BHF

H2SO4:H20

diluted-SC1

Tool name:
SSEC
Area/room:
C-RIBE
Category:
Wet process benches
Manufacturer:
Vecco
Model:
SSEC 3300
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

Instructors

Licensed Users

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