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Current status:
AVAILABLE
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Technical description
Full equipment name: Programmable Process Furnace PEO-603
General purpose: Heat treatment of III-V material
Technical data:
• For wafer sizes 3”-6”
• A maximum of 10 programs (0-9) can be stored
• A maximum of 100 steps (0-99) can be programmed and stored for each program
Note: The temperature show by the PEO-display, don't agree with the actual temperature in the middle of the wafer(s).
 

Tool name:
Peo
Area/room:
C-Q-Etch
Category:
Thermal processes
Manufacturer:
PEO
Model:
PEO-603 Anneal furnace III/V (ramp)
Tool rate:
B
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

Instructors

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