Picture of Microwave/THz Probe Station
Current status:
AVAILABLE
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Manual probe station for microwave, terahertz and optical characterization

Equipped with a 4 inch vacuum chuck. Can also handle smaller chip sizes

Wafer can be probed using magnetic probes from all four sides of the chuck

Equipped with 2 Cascade Microtech mmW large area positioners and 2 multi-contact/mixed-signal probing positioners

 

Connected instruments

Rohde & Schwarz ZVA24

Rohde & Schwarz ZC330 Extenders: 220 GHz to 330 GHz

VDI Mode WR2.2 VNA Extenders: 325 GHz to 500 GHz

Tool name:
Microwave/THz Probe Station
Area/room:
Y-MST
Category:
Metrology
Manufacturer:
MST
Model:
MST Lab
Tool rate:
B
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:
2

Instructors

Licensed Users

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