Picture of Edwards Auto 306 Albanova
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Edwards Auto 306 with FL400 chamber.

E-beam deposition and possibility of thermal deposition. LN2 cold trap for better vacuum. More info here.

Tool name:
Edwards Auto 306 Albanova
Area/room:
Albanova C1:3052
Category:
Thin film deposition
Manufacturer:
Edwards
Model:
Auto306 with FL400 chamber
Tool rate:
D
Max booking time, day:
4 hours
Max booking time, night:
8 hours
No. of future bookings:
4

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