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Edwards Auto 306 Albanova (122)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Erik Holmgren

2nd Responsible:

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Description

Edwards Auto 306 with FL400 chamber.

E-beam deposition and possibility of thermal deposition. LN₂ cold trap for better vacuum.

Details

Tool name:

Edwards Auto 306 Albanova

Area/room:

Albanova C1:3052

Category:

Thin film deposition

Manufacturer:

Edwards

Model:

Auto306 with FL400 chamber

Tool rate:

Tool Modes

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