Full equipment name: Provac PAK 600 Coating System
General purpose: Metal evaporation
• Several standard processes for deposition of AuGe, Au, Ni, Ir, Pd, Pt, Ti, Cr, Ge, Ag, Mo, W, Al, Pd, Sn
• Evaporation of other metals and dielectrics is possible.
• Wafer holder for multi-substrates up to 6’’ size.
• Possibility to deposit up to 6 different metals during one run