Picture of Barbara
Current status:
AVAILABLE
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Technical description
Full equipment name:
Provac PAK 600 Coating System
General purpose: Metal evaporation
Technical data:
• Several standard processes for deposition of AuGe, Au, Ni, Ir, Pd, Pt, Ti, Cr, Ge, Ag, Mo, W, Al, Pd, Sn
• Evaporation of other metals and dielectrics is possible.
• Wafer holder for multi-substrates up to 6’’ size.
• Possibility to deposit up to 6 different metals during one run
 

Tool name:
Barbara
Area/room:
C-Metal-III/V
Category:
Thin film deposition
Manufacturer:
Provac
Model:
PAK 600 Coating System
Tool rate:
D
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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