Picture of LPE 108
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Fredrik.E Ekström
2nd Responsible:
Files
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Description
Details
Tool name:
LPE 108
Area/room:
C-Epitaxy
Category:
Epitaxy
Manufacturer:
LPE
Model:
PE108
Tool rate:
E
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Tool Modes
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