Picture of RF Probe Station
Current status:
AVAILABLE
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Manual probe station for RF and DC characterization

Equipped with a 8 inch vacuum chuck. Can also handle smaller chip sizes

Wafer can be probed using magnetic probes from two sides of the chuck

Equipped with 2x, 10x, 20x Mitutoyo Infiniti Objectives

Equipped with a high resolution, high frame rate camera

Tool name:
RF Probe Station
Area/room:
Y-MST
Category:
Metrology
Manufacturer:
MST
Model:
MST Lab
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:
2

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