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CMP Chemical Mechanical Planarization.

Wafer sizes: 50, 75, 100, 150 mm

Processes: Si/SiGe, SiO2, SiC, InP

Tool name:
CMP
Area/room:
C-CMP
Category:
Other processes
Manufacturer:
IPEC / Axus
Model:
Avanti 472
Tool rate:
D
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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