Picture of Emma
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
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Technical description
Full equipment name: Mask aligner MA6/BA6 Karl Suss
General purpose: Mask aligner, principally for backside alignment.
Technical data:
• 350 W exposure lamp, Hg (maximum 1000W)
• Allowed substrates: 6, 4, 3, 2 inch and wafer pieces
• Wafer thickness up to 6 mm
• Exposure modes: Hard Contact, Soft Contact, Low Vacuum Contact, Vacuum Contact, Proximity
• Alignment modes: Front, Backside and Pre-bond Alignment
Inventory:
Chucks
• 2 pcs of 4 inch chucks, glass – Front- and backside alignment + aligment against the flat. Only one of these chucks has an inflatable rubber ring.
• 2, 3, and 6 inch chucks – Front- and backside alignment.*
Maskholder
• 4 inch (possible to use proximity)
• 2, 3, and 6 inch*
Adapter
• Front- and backside alignment
I-line filter
• For thick negative resist and polyimide
If you need to install this contact the machine responsible
Attention! Don’t forget to dismount the I-line filter after using it.
Special Lenses*
For rough structures. If you need to install this contact the machine responsible.
*These accessories belong to another mask aligner (521_Karl Suss) but are compatible with this equipment.

Tool name:
Emma
Area/room:
C-Gul 3
Category:
Lithography
Manufacturer:
Karl Suss
Model:
MA6/BA6
Tool rate:
C
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

Instructors

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