Picture of Prometeus manual
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Ingemar Petermann
2nd Responsible:
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Description

General description: Electric/Magnetic Characterization

Technical description
Full equipment name: Karl Suss Mod PM 5 and Temptronic ThermoChuck System mod TP0314A
General purpose: Manual Probe station and measurement at different tempratures.
Wafer size: Diam. 4" / 100 mm
Temperature range: 30 - 150 °C

Details
Tool name:
Prometeus manual
Area/room:
N-Measurement
Category:
Metrology
Manufacturer:
Karl Suss and Temptronic TermoChuck System
Model:
Manual Probestation PM 5, TP0314A
Tool rate:
B
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