Picture of Albanova Canon Projection Camera
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Taras P Golod
2nd Responsible:
Anders Liljeborg
Files
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Description

Optical lithography using projection. 2 inch wafers max.

More info here.

Details
Tool name:
Albanova Canon Projection Camera
Area/room:
Albanova C1:3049
Category:
Lithography
Manufacturer:
Canon
Model:
PPC 210
Tool rate:
C
Booking
Max booking time, day:
12 hours
Max booking time, night:
18 hours
No. of future bookings:
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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