Picture of AFM/SSRM
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DOWN
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Technical description
Full equipment name: Commercial AFM system
General purpose: atomic force microscope
Technical data:
• Scanning spreading resistance microscopy (SSRM) module
• Software: Nanoscope Ver. 5.12r2
 

Tool name:
AFM/SSRM
Area/room:
Y-3283 Saw room
Category:
Metrology
Manufacturer:
Veeco/Digital Instruments
Model:
NanoScope Dimension 3100
Tool rate:
B
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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