Picture of AFM/SSRM
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Anders Hallén
2nd Responsible:
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Description

Technical description
Full equipment name: Commercial AFM system
General purpose: atomic force microscope
Technical data:
• Scanning spreading resistance microscopy (SSRM) module
• Software: Nanoscope Ver. 5.12r2
 

Details
Tool name:
AFM/SSRM
Area/room:
Y-3283 Saw room
Category:
Metrology
Manufacturer:
Veeco/Digital Instruments
Model:
NanoScope Dimension 3100
Tool rate:
B
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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