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AJA Orion multiple sputter system.

Eight sputters, heating of sample.

More info here.

All usage must be coordinated with Vladislav Korenivskii, vk@kth.se

Tool name:
AJA Sputter Albanova
Area/room:
Albanova E1:1017A
Category:
Thin film deposition
Manufacturer:
AJA International Inc.
Model:
Orion
Tool rate:
D
Max booking time, day:
4 hours
Max booking time, night:
12 hours
No. of future bookings:
3

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