Picture of APL-HMDS
Current status:
AVAILABLE
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Technical description
Full equipment name: YES-5E Vacuum Bake / Vapour Prime Processing System (Serial # 88487)
General purpose:The YES HMDS system combines vapor priming and vacuum dehydration baking.
Hexamethyldisilazane (HMDS) is used to improve photoresist adhesion to oxides. The HMDS reacts with the oxide surface in a process known as silylation, forming a strong bond to the surface. The methyls, meanwhile, will bond with the photoresist, enhancing the photoresist adhesion.
Technical data: Tube 1 Dry / Wet Oxidation
• Vacuum pump: Alcatel Pascal 2010SD
• Vacuum measurement: Granville-Phillips
• Temperature Controller: CAL 9900
• Microprocessor : Lark Sequence Controller
 

Tool name:
APL-HMDS
Area/room:
C-APL-gul
Category:
Lithography
Manufacturer:
YES-5E
Model:
Vacuum Bake / Vapour Prime Processing System
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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