Picture of Wetb APL-gul
Current status:
AVAILABLE
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Technical description

Full equipment name: B.L.E Spinner & Hotplate Module W48
General purpose: Coating samples with photoresist films
Technical data:
• Wafer size up to 4 inch
• Spin speed range 500 - 4800 rpm
• Spin time range 0 - 60 seconds
• Interlock switch to protect spinning without vacuum or with lid open
• Programmable remote control unit
 

Tool name:
Wetb APL-gul
Area/room:
C-APL-gul
Category:
Wet process benches
Manufacturer:
Wet bench
Model:
Wet bench
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

Instructors

Licensed Users

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