Picture of Probestation 1 Manual
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AVAILABLE
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General description: Electric/Magnetic Characterization

Technical description
General purpose: 6 inch wafer prober (manual)
Technical data:
• Temperature controlled chuck: 15-300 °C
• RF and light shielded enclosure.
Connected to:
• Keithley SCS4200 parameter analyzer, 1 MP-SMUs (2 pre-amplifier <pA range), 1 HP-SMU (200V with preamplifier).

The SCS4200 been upgraded to Win 10, May 2019. The new measurement software is called Clarius and replaces KITE 



Has 4 DC probe manipulators and 2 RF probe manipulators in 180 configuration.

Tool name:
Probestation 1 Manual
Area/room:
Y-Electrical characterization
Category:
Metrology
Manufacturer:
Cascade
Model:
11000
Tool rate:
A
Max booking time, day:
12 hours
Max booking time, night:
12 hours
No. of future bookings:
5

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