General description: Electric/Magnetic Characterization
General purpose: 6 inch wafer prober (manual)
• Temperature controlled chuck: 15-300 °C
• RF and light shielded enclosure.
• Keithley SCS4200 parameter analyzer, 1 MP-SMUs (2 pre-amplifier <pA range), 1 HP-SMU (200V with preamplifier).
The SCS4200 been upgraded to Win 10, May 2019. The new measurement software is called Clarius and replaces KITE
Has 4 DC probe manipulators and 2 RF probe manipulators in 180 configuration.