Technical description

Full equipment name: Wet bench Metal 1 W40
General purpose: Etching of metals
Technical data:
• Quartz bath with heating and stirring for 6” wafers (1)
• Bubbler for 6” wafers (2)
• Aspirator
• DI-water gun
• Cassettes, cassette holders and single wafer holders marked green/blue.

Full equipment name: Wet bench metal 2 W22
General purpose: Etching of metals
Technical data:
• Quartz bath with heating and stirring for 6” wafers (3)
• Bubbler for 6” wafers (4)
• Aspirator
• Cassettes, cassette holders and single wafer holders marked grenn/blue.

Full equipment name: Wet bench metal/Au etch W24
General purpose: Etching of Au and other metal films
Technical data:<
• One PVDF bath with valve for 6” wafers (5)
• Quartz baths with heating and stirring for 6” wafers (6)
• Quartz baths with heating and stirring for 6” wafers (7 - Au etch)
• One bubbler for 6” wafers (8)
• Aspirator (syrasug)
• DI-water gun
• Nitrogen-gun
• Cassettes, cassette holders and single wafer holders marked brown-blue.