Technical description

Full equipment name: Wet bench solvent W25
General purpose: Removing organic material (resist) from wafers/samples
Technical data:
• 2 stainless steel ultrasonic baths with heater and timer for lift off (1 for 6" and 3 for 4")
• Bubbler for lift off (2)
• Stainless steel bath for aceton with valve (4 - No lift off)
• Stainless steel bath for propanol with valve (5 - No lift off)
• Bubbler (6 - No lift off)
• Nitrogen-gun
• DI Water gun
• Sprinkler system
• Cassettes, cassette holders and single wafer holders marked black-yellow.