Full equipment name: Programmable Process Furnace PEO-603
General purpose: Heat treatment of III-V material
• For wafer sizes 3”-6”
• A maximum of 10 programs (0-9) can be stored
• A maximum of 100 steps (0-99) can be programmed and stored for each program
Note: The temperature show by the PEO-display, don't agree with the actual temperature in the middle of the wafer(s).