<p><u><strong>Technical description</strong></u><br /> <strong>Full equipment name:</strong> Surface profiler Tencor-P15<br /> <strong>General purpose:</strong><br /> 1. Measure the profile of a structure<br /> <strong>Technical data:</strong><br /> • For profile measurement: All wafer size up to 6” and piece of wafer<br /> • Single wafer<br /> <strong>Equipment inventory: </strong><br /> • Two boxes with calibration structures<br /> • Manual for Tencor-P15</p> <p><strong><strong>General description: </strong></strong>Other Characterization</p>