Picture of Tencor P15
Current status:
WARNING
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<p><u><strong>Technical description</strong></u><br /> <strong>Full equipment name:</strong> Surface profiler Tencor-P15<br /> <strong>General purpose:</strong><br /> 1. Measure the profile of a structure<br /> <strong>Technical data:</strong><br /> &bull; For profile measurement: All wafer size up to 6&rdquo; and piece of wafer<br /> &bull; Single wafer<br /> <strong>Equipment inventory: </strong><br /> &bull; Two boxes with calibration structures<br /> &bull; Manual for Tencor-P15</p> <p><strong><strong>General description: </strong></strong>Other Characterization</p>

Tool name:
Tencor P15
Area/room:
C-Anneal
Category:
Metrology
Manufacturer:
Tencor
Model:
Surface profiler Tencor-P15
Tool rate:
B

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