The Maskless Aligner MLA150 is a high speed direct write lithography tool. The MLA150 patterns high-resolution, high aspect ratio, and even simple grayscale structures.

It provides an alternative to the traditional mask aligner, fully eliminating the need for masks. The system features fast automated front- and backside alignment procedures and outstanding speed: Exposing an area of 100 x 100 mm² with structures as small as 1 µm takes less than 10 minutes.