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ICPCVD (538)

Picture of ICPCVD

Current status:

WARNING

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Responsibles

1st Responsible:

Magnus Lindberg

2nd Responsible:

Files

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Description

Details

Tool name:

ICPCVD

Area/room:

C-Q-Etch

Category:

Thin film deposition

Manufacturer:

Oxford Plasma Technology

Model:

PlasmaPro 100

Tool rate:

D

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes

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