Picture of Helios 5 UC FIB/SEM Albanova
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Taras P Golod
2nd Responsible:
Adrian Iovan
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Description

FEI Helios 5 UC dual beam system.

Scanning electron microscope and focused ion beam, gallium source for ion beam, one gas injector for platinum deposition.

Details
Tool name:
Helios 5 UC FIB/SEM Albanova
Area/room:
Albanova E1:1015A
Category:
Surface analysis & TEM
Manufacturer:
FEI
Model:
Helios 5 UC
Tool rate:
D
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