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AJA ion beam etching Albanova (139)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Taras P Golod
2nd Responsible:
Erik Holmgren
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Description
AJA ion milling system
Details
Tool name:
AJA ion beam etching Albanova
Area/room:
Albanova E1:1017A
Category:
Dry etching
Manufacturer:
AJA international Inc.
Model:
AJA ion miller
Tool rate:
D
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