General purpose: Measures the profile of a structure.
DektakXT has the following capabilities:
- Stress measurement of thin films on the following substrate sizes: 3", 100 mm, 150 mm and 200 mm
- Semi-automatic measurements of step heights, roughness, etc. on regularly patterned wafers
- Simple and quick fully manual measurments on smaller samples
Step heights up to 900 µm can be measured. The 6.5 µm height range is reproducible within 0.7 nm.
The tool has two probes readily available, one gold-contaminated probe ("gold probe") and one free of contamination ("CMOS probe"). The gold probe is installed by default. Training is required to change probe.