General purpose: Measures the profile of a structure.

DektakXT has the following capabilities:

• Stress measurement of thin films on the following substrate sizes: 3", 100 mm, 150 mm and 200 mm
• Semi-automatic measurements of step heights, roughness, etc. on regularly patterned wafers
• Simple and quick fully manual measurments on smaller samples

Step heights up to 900 µm can be measured. The 6.5 µm height range is reproducible within 0.7 nm.

Restrictions:

The tool has two probes readily available, one gold-contaminated probe ("gold probe") and one free of contamination ("CMOS probe"). The gold probe is installed by default. Training is required to change probe.