Picture of DektakXT Stylus Profilometer
Current status:
AVAILABLE
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General purpose: Measures the profile of a structure.

DektakXT has the following capabilities:

  • Stress measurement of thin films on the following substrate sizes: 3", 100 mm, 150 mm and 200 mm
  • Semi-automatic measurements of step heights, roughness, etc. on regularly patterned wafers
  • Simple and quick fully manual measurments on smaller samples

Step heights up to 900 µm can be measured. The 6.5 µm height range is reproducible within 0.7 nm.

Restrictions:

The tool has two probes readily available, one gold-contaminated probe ("gold probe") and one free of contamination ("CMOS probe"). The gold probe is installed by default. Training is required to change probe.

Tool name:
DektakXT Stylus Profilometer
Area/room:
C-Anneal
Category:
Metrology
Manufacturer:
Bruker
Model:
DektakXT
Tool rate:
B

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