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Bergman Labora Inspection Microscope (578)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Mattias Ekström

2nd Responsible:

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Description

Nikon L200ND microscope for with motorized stage for automatic imaging over a wafer.

Details

Tool name:

Bergman Labora Inspection Microscope

Area/room:

C-SPTS

Category:

Metrology

Manufacturer:

Nikon

Model:

Tool rate:

Tool Modes

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