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Bergman Labora Inspection Microscope (578)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Mattias Ekström
2nd Responsible:
Per-Erik Hellström
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Description
Nikon L200ND microscope for with motorized stage for automatic imaging over a wafer.
Details
Tool name:
Bergman Labora Inspection Microscope
Area/room:
C-SPTS
Category:
Metrology
Manufacturer:
Nikon
Model:
L
Tool rate:
B
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