General:

SR2000N is a 4-point sheet resistance mapper. It can be operated manual mode and in a semi-automatic mode, controlled by a computer.

Sample size can vary from pieces to 200 mm wafers.

Mapping grids can be generated, and the default grid size is 49-points over a wafer (measurement takes a few minutes). Data can be exported in .txt-format.

Sheet resistance range is 1 mOhm/sq - 2 MOhm/sq. Thickness of metals can be automatically calculated provided the correct resistivity is given.

Restrictions:

Backside of samples must be clean

Only USB-memory sticks free from virus, worms, trojans or other maleware are allowed!