Picture of CnCV
Current status:
AVAILABLE
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Technical description
Full equipment name: CnCV 210
General purpose: Non-contact C-V / I-V
Technical data:
• Corona / Kelvin measurements for oxides. High K, and low K dielectrics.
• Near Surface Doping.
• Wide bandgap materials: dopant profiling.

Tool name:
CnCV
Area/room:
C-Epitaxy
Category:
Metrology
Manufacturer:
SEMILAB
Model:
210
Tool rate:
B

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