Parameter analyzer for current-voltage, capacitance-voltage, and ultra-fast pulsed I-V measurements to study reliability and failure analysis studies of semiconductor devices, materials and process development.

The model includes

2x I-V Source Measure Unit (SMU1 and SMU2)
• ±210 V/100 mA or ±210 V/1 A modules
• 100 fA measure resolution
• 10 aA measure resolution with optional preamp
• 10 mHz – 10 Hz very low frequency capacitance
measurements
• 100 μF load capacitance
• 4-quadrant operation
• 2 or 4-wire connections
 

Pulsed I-V Ultra-fast Pulse Measure Unit (PMU1)
• Two independent or synchronized channels of
high-speed pulsed I-V source and measure
• 200 MS/s, 5 ns sampling rate
• ±40 V (80 Vp-p), ±800 mA
• Transient waveform capture mode
• Arbitrary waveform generator for multi-level pulse
waveformwith 10 ns programmable resolution

To probe samples 3  micropositioners are available (2xS-725RPM, 1xS-725PLM) inclouding 5 and 25 um tungsten probe tips and connection to crocodile clamps.

The installed software clarius easily allows to set up and run standard IV, C-V, and pulsed I-V characterizations tests

More information, as well as the manual, can be found here: https://uk.tek.com/keithley-4200a-scs-parameter-analyzer