Nikon NSR TFHi12 is an I-line (365 nm) Stepper

Handles 100 and 150 mm wafers in cassette to cassette mode

Smaller wafers can be handle with carriers

Reticle: 6 inch 

Possibility of pellicle: Yes 

Field size: 22x22 mm²

Variable NA=0.3-0.45

Resolution:~0.5 µm at NA=0.45 and DOF~ +/- 1 µm

Resolution:~0.75 µm at NA=0.3 and DOF~ +/- 2 µm