Manual probe station for microwave, terahertz and optical characterization

Equipped with a 4 inch vacuum chuck. Can also handle smaller chip sizes

Wafer can be probed using magnetic probes from all four sides of the chuck

Equipped with 2 Cascade Microtech mmW large area positioners and 2 multi-contact/mixed-signal probing positioners

Connected instruments

Rohde & Schwarz ZVA24

Rohde & Schwarz ZC330 Extenders: 220 GHz to 330 GHz

VDI Mode WR2.2 VNA Extenders: 325 GHz to 500 GHz