Picture of Probestation 4 High Temp.
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Responsibles
1st Responsible:
Gunnar Malm
2nd Responsible:
Mattias Ekström
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Description

Signatone S-1060R 4" Hot Chuck Data Sheet (600°C)

  • Temperature Range..................Ambient to 600°C
  • Temperature Accuracy..................+/- 1°C
  • Temperature Resolution.........1°C
  • Temperature Uniformity......................+/- 1°C
  • Surface Flatness.................005" TIR across Temp Range
  • Surface/Base Expansion..........Typical 0.010" across Temp Range
  • Surface to Ground Isolation...106 ohms. ( 1014 ohms available with triax top )
  • Surface to Ground Capacitance...................<300pF
  • Electrical Noise Floor....................Approx. 10 nA
  • Chuck Actual Diameter........................4.5"
  • Chuck Height Q chuck......................1.25"
Details
Tool name:
Probestation 4 High Temp.
Area/room:
Y-Electrical characterization
Category:
Metrology
Manufacturer:
Signatone
Model:
S-1060
Tool rate:
A
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