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Probestation 4 High Temp. (453)
Current status:
DOWN
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Responsibles
1st Responsible:
Gunnar Malm
2nd Responsible:
Mattias Ekström
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Description
Signatone S-1060R 4" Hot Chuck Data Sheet (600°C)
Temperature Range..................Ambient to 600°C
Temperature Accuracy..................+/- 1°C
Temperature Resolution.........1°C
Temperature Uniformity......................+/- 1°C
Surface Flatness.................005" TIR across Temp Range
Surface/Base Expansion..........Typical 0.010" across Temp Range
Surface to Ground Isolation...10
6
ohms. ( 10
14
ohms available with triax top )
Surface to Ground Capacitance...................<300pF
Electrical Noise Floor....................Approx. 10 nA
Chuck Actual Diameter........................4.5"
Chuck Height Q chuck......................1.25"
Details
Tool name:
Probestation 4 High Temp.
Area/room:
Y-Electrical characterization
Category:
Metrology
Manufacturer:
Signatone
Model:
S-1060
Tool rate:
A
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