The Empyrean x-ray reflectometer/diffractometer uses copper Ka1 (0.15406 nm) x-rays for measurements. Two sample stages are available for general use, a three axes cradle (chi-phi-z) for substrates up to 150 mm size and a spinner stage for smaller samples. A sample changer robot is available for the spinner stage.
The detector is a PIXcel detector that allows parallel measurements of 255 channels with separation angle of ~0.013º in 2theta (full range is ~3.34º). The incident beam optics is by default a two-bounce hybrid mirror with slits to focus the x-ray beam. Smallest divergence slit for incident beam is 1/32º (0.03125º).
Applications
- Reflectivity measurements for thin film thickness, roughness and mass density determination
- Phase identification of thin films by diffraction
- Texture analysis on all kinds of materials with a preferred orientation of crystallites
- Epitaxy measurements (composition/stress and thickness) by fast reciprocal space mapping, rocking curves and 2theta-omega scans
- Possibility to automatise sequential measurements
- Possibility to do batch measurements of several sample (requires spinner with sample loader)
Restrictions
The Empyrean is intended first and foremost for thin-film, epitaxy and substrate measurements of materials that can be found in typical semiconductor processing. Powder measurement and other non-standard materials have to be discussed with the tool responsible first. Use of harmful, flammable or other substances which contaminate setup with powdering, liquid or vapour is strongly prohibited.
Only trusted users are allowed to change sample stage. Contact Mattias or Axel to change stage.