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RIE ICP O2/AR Albanova (103)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Erik Holmgren
2nd Responsible:
Adrian Iovan
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Description
Oxford Plasmalab 80+ RIE w. ICP.
Gases: oxygen and argon.
Info and Manuals
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Details
Tool name:
RIE ICP O2/AR Albanova
Area/room:
Albanova C1:3052
Category:
Dry etching
Manufacturer:
Oxford
Model:
Plasmalab 80+
Tool rate:
D
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