Technical description

Megasonics compared to Ultrasonics:
In a typical Ultrasonic cleaning process, the transducer works with a frequency between 25 kHz and 100 kHz.This lower frequency creates bigger bubbles up to diameters of 150 µm and creating higher cavitation energy when they collapse. Megasonic processes utilize frequencies from 600 kHz up to 4 MHz. These higher frequencies create smaller bubbles and when they collapse, producing a proportionally smaller amount of cavitation energy. 
The high cavitation energy produced in Ultrasonic cleaning can damage sensitive structures of substrates. The gentler cleaning energy produced by Megasonic waves is able to remove particles down to 34 nm without damaging sensitive devices.